JPH031738Y2 - - Google Patents
Info
- Publication number
- JPH031738Y2 JPH031738Y2 JP14039385U JP14039385U JPH031738Y2 JP H031738 Y2 JPH031738 Y2 JP H031738Y2 JP 14039385 U JP14039385 U JP 14039385U JP 14039385 U JP14039385 U JP 14039385U JP H031738 Y2 JPH031738 Y2 JP H031738Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- air
- plate
- opening
- blower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009423 ventilation Methods 0.000 claims description 21
- 230000000903 blocking effect Effects 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000007905 drug manufacturing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14039385U JPH031738Y2 (en]) | 1985-09-13 | 1985-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14039385U JPH031738Y2 (en]) | 1985-09-13 | 1985-09-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247826U JPS6247826U (en]) | 1987-03-24 |
| JPH031738Y2 true JPH031738Y2 (en]) | 1991-01-18 |
Family
ID=31047202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14039385U Expired JPH031738Y2 (en]) | 1985-09-13 | 1985-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031738Y2 (en]) |
-
1985
- 1985-09-13 JP JP14039385U patent/JPH031738Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6247826U (en]) | 1987-03-24 |
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